1. Introduction
• Introduction
2. Corpuscular diagnostics. Secondary–ion mass spectrometry. Rutherford backscattering
2.1. Secondary–ion mass spectrometry
• SIMS – Operating principles, plant layout
• SIMS – Analysis and interpretation of the results, examples
2.2. Rutherford backscattering
• RBS – Principles of operation, the circuit
• RBS – Analysis and interpretation of the results, examples
2.3. Analysis of elastically reflected recoil atoms (ERD)
• ERD – Principles of operation, the circuit
• ERD – Analysis and interpretation of the results, examples
2.4. The method of nuclear reactions (NRA)
• NRA – Principles of operation, the circuit
• NRA – Analysis and interpretation of the results, examples
3. Electronic diagnostics
3.1. Auger spectrometry
• Auger spectrometry – principles of operation, installation scheme
• Auger spectrometry – analysis of the results, examples
3.2. Energy– dispersion spectrometry
• Energy– Dispersion spectrometry – principles of operation, installation scheme
• Energy– Dispersion spectrometry – analysis of the results, examples
3.3. Translucent electron microscopy
• TEM – Principles of operation of the device and circuit
• TEM – Sample images and their interpretation
3.4. Scanning Electron Microscopy
• SEM – Principles and scheme of the device
• SEM – Sample images, their interpretation
4. X–ray diagnostics
4.1. The X–ray photo–electron spectroscopy (XPS)
• XPS – principles of operation of the device and circuit
• XPS – Examples of results, their interpretation
5. Probe microscopes
5.1. Tunneling microscope
• TCM – Working principles of the device circuit
• TCM – Sample images and their interpretation
5.2. The atomic force microscope
• ACM – Working principles of the device circuit
• ACM – Sample images, their interpretation
6. Conclusion
• Conclusion
• Summarizing, for a summary of the methods studied
